Efficient thermal utilization in MEMS bulk micromachined pyroelectric infrared sensor using thermal oxide thin layer
Sign Up to like & getrecommendations! Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-017-3560-0
Abstract: Pyroelectric infrared sensors utilize interfacial polymer bonding, thick porous silica layer and Si3N4 thin film as conventional methods of reducing heat sinking with substrate. The thick polymer and porous silica layers cause additional enhancement in… read more here.
Keywords: infrared sensor; pyroelectric infrared; layer; bulk micromachined ... See more keywords
Enabling Cognitive Pyroelectric Infrared Sensing: From Reconfigurable Signal Conditioning to Sensor Mask Design
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DOI: 10.1109/tii.2019.2944700
Abstract: Poor signal-to-noise ratios (SNRs) and low spatial resolutions have impeded low-cost pyroelectric infrared (PIR) sensors from many intelligent applications for thermal target detection/recognition. This article presents a cognitive signal conditioning and modulation learning framework for… read more here.
Keywords: sensor mask; conditioning; pyroelectric infrared; design ... See more keywords
Active Compressive Sensing via Pyroelectric Infrared Sensor for Human Situation Recognition
Sign Up to like & getrecommendations! Published in 2017 at "IEEE Transactions on Systems, Man, and Cybernetics: Systems"
DOI: 10.1109/tsmc.2016.2578465
Abstract: Conventional pyroelectric infrared (PIR) motion sensors use paired elements for the detection of moving targets. This method makes them incapable of measuring thermal signals from static targets. We need an active sensor that can detect… read more here.
Keywords: compressive sensing; pyroelectric infrared; static thermal; recognition ... See more keywords