Sub-micrometer pyroelectric tomography of AlScN films
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DOI: 10.1063/5.0047002
Abstract: We report on one- to three-dimensional characterization of the pyroelectric properties of aluminum scandium nitride. By means of the laser intensity modulation method, we reconstructed the in-depth distribution of the spontaneous polarization with sub-micrometer resolution.… read more here.
Keywords: pyroelectric tomography; micrometer pyroelectric; tomography alscn; sub micrometer ... See more keywords