A thickness-mode piezoelectric micromachined ultrasound transducer annular array using a PMN-PZT single crystal
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DOI: 10.1088/1361-6439/aab9d4
Abstract: Micro-electromechanical system (MEMS) technologies were used to develop a thickness-mode piezoelectric micromachined ultrasonic transducer (Tm-pMUT) annular array utilizing a lead magnesium niobate–lead zirconate titanate (PMN–PZT) single crystal prepared by the solid-state single-crystal-growth method. Dicing is… read more here.
Keywords: annular array; single crystal; pzt single; pmn pzt ... See more keywords