Large piezoelectricity on Si from highly (001)-oriented PZT thick films via a CMOS-compatible sputtering/RTP process
Sign Up to like & getrecommendations! Published in 2019 at "Materialia"
DOI: 10.1016/j.mtla.2019.100228
Abstract: Abstract Integration of lead zirconate titanate (PZT) ferroelectrics into CMOS-Si technology has become a perennial challenge due to the continuously shrinking thermal budget in semiconductor processing. In this work, Pb(Zr0.53Ti0.47)O3 (PZT) thick films (∼1 µm) were… read more here.
Keywords: process; thick films; 001 oriented; highly 001 ... See more keywords
Characterization of Kerfless Linear Arrays Based on PZT Thick Film
Sign Up to like & getrecommendations! Published in 2017 at "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control"
DOI: 10.1109/tuffc.2017.2709253
Abstract: Multielement transducers enabling novel cost-effective fabrication of imaging arrays for medical applications have been presented earlier. Due to the favorable low lateral coupling of the screen-printed PZT, the elements can be defined by the top… read more here.
Keywords: pzt thick; based pzt; thick film; linear arrays ... See more keywords