Fabrication of high quality aspheric microlens array by dose-modulated lithography and surface thermal reflow
Sign Up to like & getrecommendations! Published in 2018 at "Optics and Laser Technology"
DOI: 10.1016/j.optlastec.2017.10.026
Abstract: Abstract A novel fabrication method for high quality aspheric microlens array (MLA) was developed by combining the dose-modulated DMD-based lithography and surface thermal reflow process. In this method, the complex shape of aspheric microlens is… read more here.
Keywords: quality; aspheric microlens; quality aspheric; surface ... See more keywords