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Published in 2022 at "Optics letters"
DOI: 10.1364/ol.452530
Abstract: In this study, a hybrid method for high-quality rapid drilling of transparent hard materials which combines femtosecond laser (fs-laser) Bessel beam modifying materials and selective wet etching is presented. Using this method, micro-holes with no…
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Keywords:
quality rapid;
hard materials;
transparent hard;
high quality ... See more keywords