Magnetron sputter deposition of Ta2O5-SiO2 quantized nanolaminates.
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DOI: 10.1364/oe.487892
Abstract: Quantized nanolaminates are a type of optical metamaterials, which were discovered only recently. Their feasibility was demonstrated by atomic layer deposition and ion beam sputtering so far. In this paper, we will report on the… read more here.
Keywords: quantized nanolaminates; sputter deposition; magnetron sputter; deposition ... See more keywords