Improving the lateral homogeneity of Cu(In, Ga)Se2 layers fabricated by RF magnetron sputtering from a quaternary ceramic target
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DOI: 10.1016/j.ceramint.2018.08.305
Abstract: Abstract In this study, non-layered and well-crystallized Cu(In, Ga)Se2 (CIGS) films without Se deficiency were fabricated through annealing treatment for one-step preparation of CIGS films. The as-deposited films were simply fabricated via RF magnetron sputtering… read more here.
Keywords: magnetron sputtering; annealing treatment; ceramic target; quaternary ceramic ... See more keywords