Effect of misalignment on the dynamic characteristic of MEMS gas bearing considering rarefaction effect
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DOI: 10.1016/j.triboint.2019.06.015
Abstract: Abstract In this paper, the dynamic characteristics of MEMS gas bearing are investigated. Angular misalignment and rarefaction effect are introduced into the lubrication equation based on FK model. The partial derivative method is adopted to… read more here.
Keywords: effect; gas bearing; mems gas; rarefaction effect ... See more keywords