Effects of Ⅴ/Ⅲ ratio and Cp2Mg flow rate on characteristics of non-polar a-plane Mg-delta-doped p-AlGaN epi-layer
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DOI: 10.1016/j.spmi.2020.106632
Abstract: Abstract The non-polar a-plane Mg-delta-doped p-AlGaN epi-layers with excellent electrical conduction were achieved on r-plane sapphire substrates via metal organic chemical vapor deposition technology. The impacts of Ⅴ/Ⅲ ratio and Cp2Mg flow rate on the… read more here.
Keywords: flow rate; non polar; ratio cp2mg; algan epi ... See more keywords