The impact of O2/Ar ratio on morphology and functional properties in reactive sputtering of metal oxide thin films.
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DOI: 10.1088/1361-6528/ab0837
Abstract: Morphology is a critical parameter for various thin film applications, influencing properties like wetting, catalytic performance and sensing efficiency. In this work, we report on the impact of oxygen partial flow on the morphology of… read more here.
Keywords: thin films; ratio morphology; morphology; morphology functional ... See more keywords