Process improvement of high aspect ratio nano-gratings based on synchrotron x-ray
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DOI: 10.1088/1361-6528/ac667c
Abstract: To achieve better structural accuracy and aspect ratio, nano-gratings with a vertical angle close to 90° and a depth-to-width ratio of about 8 were prepared by synchrotron radiation. The optimal exposure dose and development time… read more here.
Keywords: nano gratings; ratio nano; aspect ratio; synchrotron ... See more keywords