Residual Stress and Tribological Performance of ZrN Coatings Produced by Reactive Bipolar Pulsed Magnetron Sputtering
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DOI: 10.3390/ma14216462
Abstract: In the past few decades, ZrN thin films have been identified as wear resistant coatings for tribological applications. The mechanical and tribological properties of ZrN thin layers depend on internal stress induced by the adopted… read more here.
Keywords: magnetron sputtering; bipolar pulsed; residual stress; stress ... See more keywords