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Published in 2017 at "Journal of Supercritical Fluids"
DOI: 10.1016/j.supflu.2017.12.010
Abstract: Abstract Supercritical fluid reactive deposition is an environmentally friendly technique for the synthesis of supported mono- or bimetallic nanoparticles. Firstly, the present article gives a short introduction into the fundamental aspects of the particle formation…
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Keywords:
fluid reactive;
reactive deposition;
supercritical fluid;
synthesis supported ... See more keywords
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Published in 2017 at "Journal of Applied Physics"
DOI: 10.1063/1.4977471
Abstract: A spatially averaged, time-dependent global plasma model has been developed to describe the reactive deposition of a TiAlSiN thin film by modulated pulsed power magnetron sputtering (MPPMS) discharges in Ar/N2 mixture gas, based on the…
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Keywords:
plasma model;
reactive deposition;
power;
modulated pulsed ... See more keywords