Mechanical and Tribological Properties of Ta-N and Ta-Al-N Coatings Deposited by Reactive High Power Impulse Magnetron Sputtering
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DOI: 10.3390/ma15093354
Abstract: In this article, the depositions and functional characterizations of Ta-N and Ta-Al-N coatings for protection purposes, grown by reactive high-power impulse magnetron sputtering onto silicon substrates, are described. Nitride films were grown while changing the… read more here.
Keywords: reactive high; impulse magnetron; power impulse; mechanical tribological ... See more keywords