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Published in 2022 at "Materials"
DOI: 10.3390/ma15093354
Abstract: In this article, the depositions and functional characterizations of Ta-N and Ta-Al-N coatings for protection purposes, grown by reactive high-power impulse magnetron sputtering onto silicon substrates, are described. Nitride films were grown while changing the…
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Keywords:
reactive high;
impulse magnetron;
power impulse;
mechanical tribological ... See more keywords