Investigation on microstructure and improved supercapacitive performance of Mn doped CuO thin films prepared by reactive radio frequency magnetron sputtering
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Materials Science: Materials in Electronics"
DOI: 10.1007/s10854-017-8118-5
Abstract: A reactive radio frequency magnetron sputtering technique was adopted to synthesize un-doped copper oxide and manganese doped copper oxide thin films. XRD analysis confirmed the formation of monoclinic phase of CuO with average crystallite size… read more here.
Keywords: reactive radio; cuo; thin films; performance doped ... See more keywords
Structural characterization of Zr-doped ZnO films deposited on quartz substrates by reactive radio frequency magnetron co-sputtering
Sign Up to like & getrecommendations! Published in 2018 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2018.02.011
Abstract: Abstract Zr-doped ZnO (Zn1−xZrxO, 0 ≤ x ≤ 0.067; ZZO) thin films were grown at room temperature by reactive radio frequency co-sputtering on quartz substrates The ZZO films have a strong preferred orientation toward the c-axis but this orientation… read more here.
Keywords: reactive radio; zzo films; radio frequency; quartz substrates ... See more keywords
Synthesis of magnesium nitride films with BN as protective layers by reactive radio-frequency magnetron sputtering
Sign Up to like & getrecommendations! Published in 2020 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2020.138271
Abstract: Abstract Magnesium nitride films were synthesized on silicon substrates by reactive radio-frequency magnetron sputtering (13.56 MHz) with a high-purity magnesium target and nitrogen as the working gas. The effects of the sputtering power and the growth… read more here.
Keywords: reactive radio; magnesium nitride; frequency magnetron; radio frequency ... See more keywords