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Published in 2019 at "Surface and Coatings Technology"
DOI: 10.1016/j.surfcoat.2019.01.082
Abstract: Abstract Aluminum oxynitride (Al-O-N) is a material suitable for hard, transparent thin films. Its physical properties and structure can be adjusted through the O-to-N ratio. Reactive Direct Current Magnetron Sputtering (R-DCMS) is a practical, widespread…
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Keywords:
reactive sputter;
arc free;
sputter deposition;
deposition ... See more keywords