DC reactively sputtered TiNx thin films for capacitor electrodes
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Materials Science: Materials in Electronics"
DOI: 10.1007/s10854-018-9066-4
Abstract: Being used as typical electrode layers in the state-of-the-art microelectronic devices, titanium nitride (TiNx) thin films have to meet the critical requirements for high conductivity, low surface roughness and thickness. In this work, TiNx thin… read more here.
Keywords: thin films; sputtered tinx; surface roughness; tinx thin ... See more keywords
Optimization of Platinum dioxide properties by plasma oxidation of sputtered PtOx
Sign Up to like & getrecommendations! Published in 2019 at "Materialia"
DOI: 10.1016/j.mtla.2019.100477
Abstract: Abstract We have previously used reactively sputtered Platinum oxide thin film as DNA sensing element. In this work, we subject the reactively sputtered Platinum oxide thin films to an additional RIE step for 3, 6… read more here.
Keywords: rie step; platinum; film; platinum oxide ... See more keywords
Processing, structure and properties of reactively sputtered films of titanium dioxide and suboxides
Sign Up to like & getrecommendations! Published in 2019 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2019.06.001
Abstract: Abstract A series of TiOx(0 O) solid solution, TiO, Ti2O3, Magneli phases, rutile and anatase TiO2. With increasing the temperature, the crystallinity, and oxygen content of the films varied, which resulted in changes in film… read more here.
Keywords: films titanium; processing structure; properties reactively; sputtered films ... See more keywords