Overview and Research on Signal Readout Technology of Microcantilever Sensor
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DOI: 10.1080/10584587.2023.2191516
Abstract: Abstract Since 1986, the first microcantilever applied in atomic force microscope, the device manufacturing technology, driving method and readout technology have improved significantly. In this paper, five readout technologies will be introduced in detail, and… read more here.
Keywords: microcantilever; readout technology; detection; readout ... See more keywords