EUV lithography finally ready for fabs
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DOI: 10.1109/mspec.2018.8241736
Abstract: "A fab is like an iceberg," someone tells me. I can't tell who because we're all covered head to toe in clean-room garb. A tour of GlobalFoundries' Fab 8 in Malta, N.Y., certainly reinforces that… read more here.
Keywords: euv lithography; finally ready; lithography finally; ready fabs ... See more keywords