Multiple Granularities Generative Adversarial Network for Recognition of Wafer Map Defects
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DOI: 10.1109/tii.2021.3092372
Abstract: Wafer map defect recognition (WMDR) is an important part of the integrated circuit manufacturing system. Accurate recognition of wafer map defects can help operators troubleshoot root causes of the abnormal process, and then accelerate the… read more here.
Keywords: recognition wafer; network; wafer map; wafer ... See more keywords