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Published in 2022 at "Transactions of the Institute of Measurement and Control"
DOI: 10.1177/01423312211069742
Abstract: Long range optical rulers measuring distance greater than 10 nm have important applications in monitoring biological processes, nanolithography, and nanometrology. In this work, we show that lateral displacement over 120 nm can be determined by measuring two…
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Keywords:
optical anapole;
referenced nanometric;
displacement;
nanometric displacement ... See more keywords