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Published in 2017 at "Journal of Applied Physics"
DOI: 10.1063/1.4984892
Abstract: We used two novel approaches to produce sub-wavelength structure anti-reflection coatings on silicon for millimeter and sub-millimeter wave bands: picosecond laser ablation and dicing with beveled saws. We produced pyramidal structures with both techniques. The…
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Keywords:
sub wavelength;
anti reflection;
millimeter wave;
reflection coatings ... See more keywords