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Published in 2022 at "Optics express"
DOI: 10.1364/oe.448069
Abstract: The results of the investigation of the reflective characteristics of multilayer mirrors based on Ru/Y are presented. Reflection coefficients at the level of 38.5% at an operating wavelength of 9.4 nm. It is shown that…
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Keywords:
multilayer;
spectral range;
multilayer mirrors;
mirrors spectral ... See more keywords