Spontaneous Registration of Sub-10 nm Features Based on Subzero Celsius Spin-Casting of Self-Assembling Building Blocks Directed by Chemically Encoded Surfaces.
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DOI: 10.1021/acsnano.8b03378
Abstract: For low-cost and facile fabrication of innovative nanoscale devices with outstanding functionality and performance, it is critical to develop more practical patterning solutions that are applicable to a wide range of materials and feature sizes… read more here.
Keywords: spin casting; temperature; registration sub; spin ... See more keywords