Influence of extended crystallographic defects on the formation kinetics of oxygen-related thermal donors in multicrystalline silicon
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DOI: 10.1016/j.jcrysgro.2019.01.008
Abstract: Abstract Oxygen-related thermal donors generated generally form less effectively in multicrystalline than in Czochralski grown monocrystalline silicon. In addition to a lower interstitial oxygen concentration, carbon and extended crystallographic defects are possible candidates that can… read more here.
Keywords: multicrystalline silicon; formation; related thermal; thermal donors ... See more keywords