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Published in 2023 at "Optics letters"
DOI: 10.1364/ol.491408
Abstract: Standard surface specifications for mid-spatial frequency (MSF) errors do not capture complex surface topography and often lose critical information by making simplifying assumptions about surface distribution and statistics. As a result, it is challenging to…
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Keywords:
surface errors;
relative modulation;
pupil difference;
mid spatial ... See more keywords