Improved electro-mechanical reliability of flexible systems with alloyed Mo-Ta adhesion layers
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DOI: 10.1016/j.tsf.2021.138533
Abstract: Abstract Sputter deposited Mo/Al/Mo multilayers are widely used material systems for electrodes in display technologies. In this study, the electro-mechanical behavior of simplified bilayer versions was improved for flexible applications through substitution of the Mo… read more here.
Keywords: improved electro; reliability flexible; flexible systems; electro mechanical ... See more keywords