Performance enhancement of Ge/Si avalanche photodetector by specific sidewall passivation using remote oxygen plasma treatment
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DOI: 10.1088/1361-6463/ad455f
Abstract: We report an obvious improvement in the performance of a separated absorption charger-layer multiplication Ge/Si avalanche photodetector, achieved by passivating the sidewalls with a low-temperature remote oxygen plasma (ROP) treatment. The dangling bonds on the… read more here.
Keywords: remote oxygen; device; performance; passivation ... See more keywords