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Published in 2021 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2021.105903
Abstract: Abstract In this paper, it is found that the residual GaN has a great impact on the two-step-grown GaN on sapphire substrates. The samples which are grown with a conventional system baking process present a…
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Keywords:
two step;
gan sapphire;
residual gan;
step grown ... See more keywords