Optimizing stress resistance in MEMS inertial sensors through material and thickness variations
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DOI: 10.11591/ijeecs.v39.i1.pp110-117
Abstract: Stress on the micro-electromechnical system (MEMS) sensors significantly decreases sensor accuracy. Thermomechanical stresses induced by the packaging assembly process and external loads during operation induce a shift in the output signal (offset) of MEMS sensors.… read more here.
Keywords: inertial sensors; material thickness; resistance mems; stress ... See more keywords