Microwave Resistivity of Thermally Oxidized High Resistivity Silicon Wafers
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Electronic Materials"
DOI: 10.1007/s11664-017-5636-0
Abstract: We used a microwave dielectric resonator to study how the process of thermal oxidation of high resistivity silicon wafers reduces the wafer microwave resistivity. Measurements were performed before surface thermal oxidation, after the oxidation, and… read more here.
Keywords: resistivity; microwave resistivity; high resistivity; resistivity silicon ... See more keywords
Investigation of etching method for fabricating deep through holes on ultra-high resistivity silicon*
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Semiconductors"
DOI: 10.1088/1674-4926/38/5/056002
Abstract: In this paper, the etching characteristics of the ultra-high resistivity silicon (UHRS) by using the Bosch process were investigated. The experimental results indicated that the sulfur hexafluoride flux, the temperature of the substrate, the platen… read more here.
Keywords: deep holes; high resistivity; resistivity silicon; ultra high ... See more keywords
RF Dielectric Loss Due to MOCVD Aluminum Nitride on High Resistivity Silicon
Sign Up to like & getrecommendations! Published in 2017 at "IEEE Transactions on Microwave Theory and Techniques"
DOI: 10.1109/tmtt.2017.2656865
Abstract: The contribution of high-frequency losses from an aluminum nitride (AlN) layer on high resistivity silicon (Si) is reported. The AlN, deposited on silicon via metalorganic chemical vapor phase deposition as a nucleation layer for subsequent… read more here.
Keywords: aluminum nitride; high resistivity; resistivity silicon; silicon ... See more keywords