Development of a wide-width raster scanning optical system for high-resolution ultraviolet laser direct micro-patterning
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DOI: 10.1016/j.optlaseng.2020.106179
Abstract: Abstract We developed F-theta raster scanning optics for high-resolution ultraviolet (UV) beam direct micro-patterning, capable of machining on a 300-mm wide image with a confined beam spot of less than 20 μm, a 13.5% spot size.… read more here.
Keywords: resolution; high resolution; resolution ultraviolet; optics ... See more keywords