Angle-resolved STEM using an iris aperture: Scattering contributions and sources of error for the quantitative analysis in Si.
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DOI: 10.1016/j.ultramic.2020.113175
Abstract: The angle-resolved electron scattering is investigated in scanning-transmission electron microscopy (STEM) using a motorised iris aperture placed above a conventional annular detector. The electron intensity scattered into various angle ranges is compared with simulations that… read more here.
Keywords: sources error; angle; iris aperture; resolved stem ... See more keywords