Articles with "resonance plasma" as a keyword



Photo from wikipedia

Atomic and Electronic Structure of SiOx Films Obtained with Hydrogen Electron Cyclotron Resonance Plasma

Sign Up to like & get
recommendations!
Published in 2020 at "Journal of Experimental and Theoretical Physics"

DOI: 10.1134/s1063776120110084

Abstract: The silicon oxide thin films obtained by thermal SiO2 treatment in hydrogen electron cyclotron resonance plasma at various exposure times are investigated. Using X-ray photoelectron spectroscopy, we have established that such treatment leads to a… read more here.

Keywords: resonance plasma; hydrogen; films obtained; electron cyclotron ... See more keywords