Design and simulations of a resonant accelerometer
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DOI: 10.1007/s00542-017-3535-1
Abstract: A resonant accelerometer was designed and simulated in detail. The structure was composed of external frame and internal structure. The internal structure consists of a single proof mass, a pair of resonators and elastic beams.… read more here.
Keywords: simulations resonant; design simulations; resonant accelerometer; structure ... See more keywords
Dynamic analysis of the resonator for resonant accelerometer
Sign Up to like & getrecommendations! Published in 2018 at "Sensor Review"
DOI: 10.1108/sr-11-2017-0239
Abstract: Purpose This paper aims to develop a resonant accelerometer for structure optimization. The dynamic analysis of the resonator for resonant accelerometer are investigated. Design/methodology/approach First, the working principle and mechanical model of the resonator are… read more here.
Keywords: resonator; resonant accelerometer; accelerometer; dynamic analysis ... See more keywords
High-Stability Quartz Resonant Accelerometer With Micro-Leverages
Sign Up to like & getrecommendations! Published in 2021 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2020.3036121
Abstract: This study proposes a highly stable differential resonant accelerometer that is monolithically micro-machined from a piece of ultrapure, single z-cut crystal quartz. The overall structure of quartz accelerometer is centrally symmetrical, which comprises two double-ended… read more here.
Keywords: tex math; micro leverages; resonant accelerometer; inline formula ... See more keywords
A MEMS Resonant Accelerometer With High Performance of Temperature Based on Electrostatic Spring Softening and Continuous Ring-Down Technique
Sign Up to like & getrecommendations! Published in 2018 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2018.2852647
Abstract: Temperature fluctuations seriously damage the performance of resonant accelerometers. Two approaches have been proposed in this paper to address this problem. In structural design, an electrostatic softening spring is utilized to modulate the external acceleration… read more here.
Keywords: temperature; performance temperature; continuous ring; resonant accelerometer ... See more keywords
A Silicon Resonant Accelerometer Embedded in An Isolation Frame with Stress Relief Anchor
Sign Up to like & getrecommendations! Published in 2019 at "Micromachines"
DOI: 10.3390/mi10090571
Abstract: Bias thermal sensitivity is a significant performance parameter of a silicon resonant accelerometer (SRA) and is normally used to evaluate the degree of engineering practicability. Theoretical analysis demonstrates that temperature-induced stress is the dominant factor… read more here.
Keywords: isolation frame; frame stress; stress; resonant accelerometer ... See more keywords
Design Optimization of a Compact Double-Ended-Tuning-Fork-Based Resonant Accelerometer for Smart Spindle Applications
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DOI: 10.3390/mi11010042
Abstract: With the rapid developments of the Industrial Era 4.0, numerous sensors have been employed to facilitate and monitor the quality of machining processes. Among them, accelerometers play an important role in chatter detection and suppression… read more here.
Keywords: double ended; tuning fork; resonant accelerometer; ended tuning ... See more keywords
Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer
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DOI: 10.3390/mi13081281
Abstract: In this study, a dynamic equation for a micromechanical resonant accelerometer based on electrostatic stiffness is analyzed, and the parameters influencing sensitivity are obtained. The sensitivity can be increased by increasing the detection proof mass… read more here.
Keywords: sensitivity; micromechanical resonant; accelerometer; analysis ... See more keywords
Coupled Double Closed-Loop Control for an MEMS Resonant Accelerometer
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DOI: 10.3390/mi13101612
Abstract: There is mutual coupling between amplitude control and frequency tracking control in the closed-loop control of micromechanical resonant sensors, which restricts sensor performance. This paper introduces the principle of an in-plane vibration micromechanical resonant accelerometer… read more here.
Keywords: loop control; loop; control; resonant accelerometer ... See more keywords