Temperature compensation of MEMS resonant accelerometers with an on-chip platinum film thermometer
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DOI: 10.1088/1361-6439/acd78c
Abstract: Temperature-dominated drift is generally the main error source for high-performance micromachined resonant accelerometers (MRAs) due to inherent thermal stress effect of resonator structure and die-attach process. This paper describes the design and experimental evaluation of… read more here.
Keywords: temperature compensation; resonant accelerometers; compensation; temperature ... See more keywords