A Triaxial Accelerometer Based on Differential Resonant Beams and Force-Balanced Capacitive Plates
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DOI: 10.1109/jsen.2019.2911740
Abstract: This paper presents the design, simulation, fabrication, and experiment of a triaxial accelerometer based on differential resonant beams and force-balanced capacitive plates. The triaxial accelerometer is composed of a proof mass, four bridge resonators with… read more here.
Keywords: proof mass; force balanced; triaxial accelerometer; resonant beams ... See more keywords