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Resonant Magnetometer for Ultralow Magnetic Field Detection by Integrating Magnetoelastic Membrane on Film Bulk Acoustic Resonator

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Published in 2022 at "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control"

DOI: 10.1109/tuffc.2022.3144392

Abstract: Here, we report on a composite nanomechanical resonant magnetometer with magnetoelastic thin film integrated on the surface of a film bulk acoustic resonator (FBAR). By exploiting the delta-E effect of magnetoelastic thin film and resonance… read more here.

Keywords: film bulk; resonant magnetometer; film; detection ... See more keywords