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Resonant MEMS Accelerometer With CW Laser Excitation

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1 Published in 2020 at "Journal of Microelectromechanical Systems"

DOI: 10.1109/jmems.2020.3015291

Abstract: A silicon MEMS resonator which forms an optical cavity with its package is self-excited and interrogated with a CW laser beam at telecom wavelengths delivered to the device through optical fiber. Self-oscillation at 68 kHz… read more here.

Keywords: resonant mems; laser excitation; accelerometer laser; mems accelerometer ... See more keywords

Design and Experimental Validation of a Piezoelectric Resonant MEMS Phase Comparator

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0 Published in 2024 at "Journal of Microelectromechanical Systems"

DOI: 10.1109/jmems.2024.3455106

Abstract: In this paper, the design, concept and experimental validation of the performances of a piezoelectric resonant microelectromechanical systems (MEMS) phase comparator is presented. Compared to traditional integrated circuits, the potential benefits of a MEMS phase… read more here.

Keywords: experimental validation; resonant mems; mems phase; design ... See more keywords

Non-Linear Frequency Noise Modulation in a Resonant MEMS Accelerometer

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0 Published in 2017 at "IEEE Sensors Journal"

DOI: 10.1109/jsen.2017.2703156

Abstract: Resonant MEMS accelerometers offer the potential for very high resolution and wide bandwidth measurements over a large input dynamic range. The read-out is implemented by constructing an oscillator with the resonator as the primary frequency… read more here.

Keywords: resonant mems; modulation; frequency; non linear ... See more keywords

A Bent-TBTF Resonant MEMS Accelerometer Using Auxiliary Supporting Beams

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0 Published in 2024 at "IEEE Electron Device Letters"

DOI: 10.1109/led.2024.3453324

Abstract: This letter demonstrates a high-responsivity piezoelectric resonant MEMS accelerometer using a bent-TBTF resonator. Different from the conventional bent-beam resonant accelerometers, the proposed device uses two auxiliary supporting beams that can be designed to control the… read more here.

Keywords: supporting beams; resonant mems; bent tbtf; auxiliary supporting ... See more keywords

Experimental Evaluation of Vibration Influence on a Resonant MEMS Scanning System for Automotive Lidars

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2 Published in 2022 at "IEEE Transactions on Industrial Electronics"

DOI: 10.1109/tie.2021.3065608

Abstract: This article demonstrates a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the… read more here.

Keywords: resonant mems; mems mirror; vibration; mems scanning ... See more keywords