Resonant MEMS Accelerometer With CW Laser Excitation
Sign Up to like & getrecommendations! Published in 2020 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2020.3015291
Abstract: A silicon MEMS resonator which forms an optical cavity with its package is self-excited and interrogated with a CW laser beam at telecom wavelengths delivered to the device through optical fiber. Self-oscillation at 68 kHz… read more here.
Keywords: resonant mems; laser excitation; accelerometer laser; mems accelerometer ... See more keywords
Non-Linear Frequency Noise Modulation in a Resonant MEMS Accelerometer
Sign Up to like & getrecommendations! Published in 2017 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2017.2703156
Abstract: Resonant MEMS accelerometers offer the potential for very high resolution and wide bandwidth measurements over a large input dynamic range. The read-out is implemented by constructing an oscillator with the resonator as the primary frequency… read more here.
Keywords: resonant mems; modulation; frequency; non linear ... See more keywords
Experimental Evaluation of Vibration Influence on a Resonant MEMS Scanning System for Automotive Lidars
Sign Up to like & getrecommendations! Published in 2022 at "IEEE Transactions on Industrial Electronics"
DOI: 10.1109/tie.2021.3065608
Abstract: This article demonstrates a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the… read more here.
Keywords: resonant mems; mems mirror; vibration; mems scanning ... See more keywords