Articles with "resonant microcantilever" as a keyword



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Thermogravimetric Analysis on a Resonant Microcantilever.

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Published in 2022 at "Analytical chemistry"

DOI: 10.1021/acs.analchem.2c01374

Abstract: Thermogravimetric analysis (TGA) is a widely applied classic method for material characterization. However, the existing TGA method has reached its technical ceiling in regard to its sensitivity, efficiency, application scope, and extensibility. With temperature-programming and… read more here.

Keywords: thermogravimetric analysis; tga; resonant microcantilever; mems tga ... See more keywords
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Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor.

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Published in 2022 at "Nano letters"

DOI: 10.1021/acs.nanolett.1c04378

Abstract: A resonant microcantilever sensor is fabricated from a zinc oxide (ZnO) thin film, which serves as both the structural and sensing layers. An open-air spatial atomic layer deposition technique is used to deposit the ZnO… read more here.

Keywords: microcantilever; humidity; resonant microcantilever; self actuated ... See more keywords