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Published in 2022 at "Analytical chemistry"
DOI: 10.1021/acs.analchem.2c01374
Abstract: Thermogravimetric analysis (TGA) is a widely applied classic method for material characterization. However, the existing TGA method has reached its technical ceiling in regard to its sensitivity, efficiency, application scope, and extensibility. With temperature-programming and…
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Keywords:
thermogravimetric analysis;
tga;
resonant microcantilever;
mems tga ... See more keywords
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Published in 2022 at "Nano letters"
DOI: 10.1021/acs.nanolett.1c04378
Abstract: A resonant microcantilever sensor is fabricated from a zinc oxide (ZnO) thin film, which serves as both the structural and sensing layers. An open-air spatial atomic layer deposition technique is used to deposit the ZnO…
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Keywords:
microcantilever;
humidity;
resonant microcantilever;
self actuated ... See more keywords