Characterization of CMOS-MEMS Resonant Pressure Sensors
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DOI: 10.1109/jsen.2017.2747140
Abstract: Comprehensive characterization results of CMOS-microelectromechanical systems resonant pressure sensor are presented. We have extensively evaluated the key performance parameters of our device in terms of quality factor ( $Q$ ) variations under variable conditions of… read more here.
Keywords: tex math; resonant pressure; inline formula;
An All-Silicon Resonant Pressure Microsensor Based on Eutectic Bonding
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DOI: 10.3390/mi14020441
Abstract: In this paper, an all-Si resonant pressure microsensor based on eutectic bonding was developed, which can eliminate thermal expansion coefficient mismatches and residual thermal stresses during the bonding process. More specifically, the resonant pressure microsensor… read more here.
Keywords: resonant pressure; microsensor; cap; eutectic bonding ... See more keywords
A Method for Fabricating Cavity-SOI and Its Verification Using Resonant Pressure Sensors
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DOI: 10.3390/mi16030297
Abstract: Cavity silicon on insulator (Cavity-SOI) offers significant design flexibility for microelectromechanical systems (MEMS). Notably, the shape and depth of the cavity can be tailored to specific requirements, facilitating the realization of intricate multi-layer structural designs.… read more here.
Keywords: cavity; fabrication; cavity soi; resonant pressure ... See more keywords