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Published in 2017 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2017.2747140
Abstract: Comprehensive characterization results of CMOS-microelectromechanical systems resonant pressure sensor are presented. We have extensively evaluated the key performance parameters of our device in terms of quality factor ( $Q$ ) variations under variable conditions of…
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Keywords:
tex math;
resonant pressure;
inline formula;
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Published in 2023 at "Micromachines"
DOI: 10.3390/mi14020441
Abstract: In this paper, an all-Si resonant pressure microsensor based on eutectic bonding was developed, which can eliminate thermal expansion coefficient mismatches and residual thermal stresses during the bonding process. More specifically, the resonant pressure microsensor…
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Keywords:
resonant pressure;
microsensor;
cap;
eutectic bonding ... See more keywords