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Published in 2021 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/ac3466
Abstract: As silicon transistors face challenges in scaling, nanoelectromechanical systems (NEMS) have emerged as a promising candidate for computing due to the ultralow power consumption and high-temperature compatibility. Yet there is still limited research about highly…
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Keywords:
based resonator;
cantilever;
cantilever based;
resonator reconfigurable ... See more keywords