On-Chip Piezoelectric Actuation of Nanomechanical Resonators Containing a Two-Dimensional Electron Gas
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DOI: 10.1134/s0021364019040052
Abstract: The on-chip piezoelectric actuation is experimentally shown to be a suitable method for driving the resonant vibrations of AlGaAs/GaAs-based nanomechanical resonators containing a two-dimensional electron gas. Both flexural and torsional vibrations of 166 nm-thick cantilevers… read more here.
Keywords: nanomechanical resonators; chip piezoelectric; resonators containing; actuation ... See more keywords