On the response of MEMS resonators under generic electrostatic loadings: theoretical analysis
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DOI: 10.1007/s11071-019-05024-3
Abstract: We present an investigation of the dynamic behavior of an electrostatically actuated resonant structure, resonator, under the simultaneous excitation of primary and subharmonic resonances. A comprehensive analytical solution is obtained via the method of Multiple… read more here.
Keywords: response; excitation; generic electrostatic; response mems ... See more keywords