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Published in 2018 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927618004749
Abstract: The ZEISS ORION NanoFab is a multi-ion beam platform which makes available a combination of helium, neon, and gallium focused ion beams (FIBs). The helium beam is commonly used for imaging, and in this capacity…
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Keywords:
sims recent;
results bam;
nanofab sims;
ion ... See more keywords