Lens-based phase retrieval under spatially partially coherent illumination - Part II: Shape measurements
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DOI: 10.1016/j.optlaseng.2020.106407
Abstract: Abstract We experimentally demonstrate the shape measurement of micro objects by means of phase retrieval under spatially partially coherent illumination. This approach offers an extended depth of focus, vibration insensitivity, short measurement time and precise… read more here.
Keywords: shape; retrieval; spatially partially; retrieval spatially ... See more keywords