A miniature laser diode interferometer with self-compensation of retroreflector’s motion errors for displacement feedback of small-sized micro/nano motion stages
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DOI: 10.1016/j.measurement.2021.110172
Abstract: Abstract The effects of the retroreflector’s motion errors on the measurement accuracy of a miniature laser diode interferometer (MLDI), which is designed as a displacement feedback device for small-sized micro/nano motion stages, are investigated. A… read more here.
Keywords: motion; motion errors; compensation; interferometer ... See more keywords