MEMS-based thermoelectric infrared sensors: A review
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DOI: 10.1007/s11465-017-0441-2
Abstract: In the past decade, micro-electromechanical systems (MEMS)-based thermoelectric infrared (IR) sensors have received considerable attention because of the advances in micromachining technology. This paper presents a review of MEMS-based thermoelectric IR sensors. The first part… read more here.
Keywords: thermoelectric infrared; based thermoelectric; review mems; mems based ... See more keywords
Review of MEMS Based Fourier Transform Spectrometers
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DOI: 10.3390/mi11020214
Abstract: Fourier transform spectrometers (FTS), mostly working in infrared (IR) or near infrared (NIR) range, provide a variety of chemical or material analysis with high sensitivity and accuracy and are widely used in public safety, environmental… read more here.
Keywords: review mems; transform spectrometers; mems based; based fourier ... See more keywords
A Review of MEMS Capacitive Microphones
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DOI: 10.3390/mi11050484
Abstract: This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These… read more here.
Keywords: capacitive microphones; review mems; mems capacitive;