A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies
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DOI: 10.3390/mi13081255
Abstract: The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in recent years. It is different from the traditional mechanical rotor gyroscope in that it structurally discards the high-speed rotor and other moving… read more here.
Keywords: symmetric silicon; mems gyroscope; mode matching; review symmetric ... See more keywords